Key EUV research was funded by the US government, and developed at Lawrence Livermore/Berkeley Labs & Sandia national labs. The IP is owned by the US government and they created a licensing vehicle, Silicon Valley Labs, to commercialize the technology. ASML acquired licenses to these IPs with its acquisition of Silicon Valley Labs in 2001.
ASML acquired SVGI (Silicon Valley Group, doesn't seem to have been created as a licensing vehicle, apparently founded in 1977), but according to wikipedia it already had access to the technology (SVGI, Intel, and some other US chip manufacturers had access to the tech).
Nowhere in any of the press articles about the acquisition they mention EUV as being a factor (seems like standard industry consolidation instead). If anything they were really far from delivering EUV at the time (it took close to 20y).
