ASML is trying to increase the world's capacity by ramping up their production of EUV machines to 50 per year. [1] The ASML CEO stated it's probably not possible for the world to produce more than that. These machines are ~$150 million ea and building one is insanely complicated. [2]
Their max is about double that (other kinds of systems, and service.) That’s about a p/e of 60 which is too high but what this market has done to many stocks. There is some expectation of growth, too, of course. ASML will keep pushing their capabilities and if trends continue, they should eventually be selling individual machines worth an order of magnitude more.
[1] https://www.anandtech.com/show/15428/asml-ramps-up-euv-scann...
[2] https://www.youtube.com/watch?v=jJIO7aRXUCg